Functionalization of microfluidic devices by microstructures created with proton beam lithography

Microfluidic devices have become important part of technology nowadays in numerous fields application, such as chemical reactions, biosensors, synthesis nanomaterials, diagnostic device for detection biological samples, etc. In this work, a new fabrication approach, poly(dimethyl-siloxane) (PDMS) microstructures were integrated into PDMS microdevices by combining proton beam lithography and conventional UV techniques. This way, the can be made from same material, which is not only useful, but case certain applications, it essential. work deals with design various microfluidic without microstructures, passive mixing purposes. The investigation involves computer simulation optimization, then chips above mentioned methods. Finally, analysis efficiency micromixer was realized UV/vis spectroscopy at different fluid flow rates. Compared to small size whole chip, high could achieved.